Fabrication of Metal Roller Mold with Nanoscale Metal Pattern Using Nanoimprint Lithography

Fabrication of Metal Roller Mold with Nanoscale Metal Pattern Using Nanoimprint Lithography

Geehong Kim
KIMM

In this work, fabrication of metal roller mold with nanoimprinted pattern was demonstrated. To get metal nanopattern on s metal roller mold, nanoimprint lithography (NIL) and subsequent electroplating (EP) process were conducted. Ultraviolet (UV) or Thermal NIL based nanopatterning were carried out to fabricate polymer-based nanopatterns with the minimum feature size of 300nm. EP process resulted in nickel (Ni) nanopattern of 300nm in linewidth from the polymer nanoimprinted pattern. A large area Ni stamp with the nanoscale Ni pattern was fabricated by laser cutting and tiling process. We successfully fabricated a Ni roller mold with feature size of 300nm in linewidth by attaching the Ni stamp to the surface of a roller body.