Flexible Transparent Thin Film Heater on Polymer/Metal/Polymer Multilayered Structure Fabricated by Pilot Scale Roll-to-Roll Sputter

Flexible Transparent Thin Film Heater on Polymer/Metal/Polymer Multilayered Structure Fabricated by Pilot Scale Roll-to-Roll Sputter

Mac Kim
KRICT

Transparent and flexible film heaters have attracted much attention in recent years because they can be applied to outdoor displays, automotive windows, solar cells, and camera lenses to prevent fogging and freezing and heat sources for microchips and thermal sensors. Film heaters can be fabricated by depositing materials that exhibit high electrical conductivity and high light transmittance on transparent and flexible substrates such as polyethylene terephthalate. Flexible multi-layer transparent electrodes such as oxide/metal/oxide structure using flexibility and low electrical resistance of metal, and high transmittance of oxide have very low sheet resistance (several O/sq.) and a high transmittance of 80% or more. In addition, a continuous process with large area is possible through roll-to-roll sputtering. In this study, we introduce a transparent, flexible, and surface-repellent film heater of oxide(polymer)/metal/oxide(inorganic, polymer) trilayer thin film manufactured by a large area roll-to-roll sputtering process. Silver and copper were used for the intermediate metal layer. Flexible multi-layer transparent electrodes exhibited excellent sheet resistance and high transmittance. To demonstrate the potential of the oxide(polymer)/metal/oxide(inorganic, polymer) trilayer thin films as flexible transparent film heaters we tested their performance in surface heating.