R2R Technology and Equipment for Barrier Applications

R2R Technology and Equipment for Barrier Applications

Dr. Andreas Nilsson
Von Ardenne

Both flexible and rigid electronic planar devices often require barrier layers protecting their functional layers and elements from oxygen and water vapour. Depending on the required barrier level, barrier systems often contain one or several transparent inorganic layers that need to provide a good intrinsic barrier behavior and a low defect density. The talk will present latest findings on sputter deposition of barrier layers based on ternary and quaternary compounds. Aspects of R2R PVD equipment for deposition of barrier layers will also be discussed.